1\u3001\u7ed3\u7684\u5b9a\u4e49\uff1a\u7ed3\uff08junction\uff09\u5c31\u662f\u5bcc\u542b\u7535\u5b50\u533a\u57df\uff08N\u578b\u533a\uff09\u4e0e\u5bcc\u542b\u7a7a\u7a74\u533a\u57df\uff08P\u578b\u533a\uff09\u7684\u5206\u754c\u5904\uff0c\u5177\u4f53\u4f4d\u7f6e\u5c31\u662f\u7535\u5b50\u6d53\u5ea6\u548c\u7a7a\u7a74\u6d53\u5ea6\u76f8\u540c\u7684\u5730\u65b9\uff0c\u9760\u70ed\u6269\u6563\u6216\u79bb\u5b50\u6ce8\u5165\u53ef\u5f62\u6210\u7ed3\uff1b
\n2\u3001\u63ba\u6742\u533a\u548c\u7ed3\u7684\u6269\u6563\u5f62\u6210\uff1a
\na.\u6269\u6563\uff1a\u662f\u4e00\u79cd\u6750\u6599\u901a\u8fc7\u53e6\u4e00\u79cd\u6750\u6599\u7684\u8fd0\u52a8\uff0c\u662f\u4e00\u79cd\u81ea\u7136\u7684\u5316\u5b66\u8fc7\u7a0b\u3002\u4e24\u4e2a\u5fc5\u8981\u6761\u4ef6\u4e00\u662f\u4e00\u79cd\u6750\u6599\u7684\u6d53\u5ea6\u5fc5\u987b\u9ad8\u4e8e\u53e6\u5916\u4e00\u79cd\u6750\u6599\u7684\u6d53\u5ea6\uff0c\u5176\u6b21\u662f\u7cfb\u7edf\u5185\u90e8\u5fc5\u987b\u6709\u8db3\u591f\u7684\u80fd\u91cf\u4f7f\u9ad8\u6d53\u5ea6\u7684\u6750\u6599\u8fdb\u5165\u6216\u901a\u8fc7\u53e6\u4e00\u79cd\u6750\u6599\uff1b
\nb.NP\u7ed3\uff1a\u63ba\u6742\u533a\u4e2dN\u578b\u539f\u5b50\u7684\u6d53\u5ea6\u8f83\u9ad8\uff0c\u53cd\u4e4bPN\u7ed3\u63ba\u6742\u533a\u4e2dP\u578b\u539f\u5b50\u7684\u6d53\u5ea6\u8f83\u9ad8\uff1b
\nc.\u6269\u6563\u5de5\u827a\u7684\u76ee\u7684:
\n\u25a0\u5728\u6676\u5706\u8868\u9762\u4ea7\u751f\u5177\u4f53\u63ba\u6742\u539f\u5b50\u7684\u6570\u91cf\uff08\u6d53\u5ea6\uff09\uff1b
\n\u25a0\u5728\u6676\u5706\u8868\u9762\u4e0b\u7684\u7279\u5b9a\u4f4d\u7f6e\u5904\u5f62\u6210NP\uff08\u6216\uff09PN\u7ed3\uff1b
\n\u25a0\u5728\u6676\u5706\u8868\u9762\u5c42\u5f62\u6210\u7279\u5b9a\u7684\u63ba\u6742\u539f\u5b50\uff08\u6d53\u5ea6\uff09\u5206\u5e03\u3002
\nd.\u6a2a\u5411\uff08lateral\uff09\u6216\u4fa7\u5411\uff08side\uff09\u6269\u6563\u3001\u540c\u578b\u63ba\u6742\uff08\u4e0d\u4f1a\u5f62\u6210\u7ed3\uff09\uff1b
\ne.\u7ed3\u7684\u56fe\u5f62\u663e\u793a\u3001\u6d53\u5ea6\u968f\u6df1\u5ea6\u53d8\u5316\u7684\u66f2\u7ebf\uff1b
\n3\u3001\u6269\u6563\u5de5\u827a\u7684\u6b65\u9aa4\uff1a\u56fa\u6001\u6269\u6563\u5de5\u827a\uff08solid-state diffusion\uff09\u5f62\u6210\u7ed3\u9700\u8981\u4e24\u6b65\uff1a\u6dc0\u79ef\uff08deposition\uff09\u548c\u63a8\u8fdb\u6c27\u5316\uff08drive-in-oxidation\uff09\uff0c\u5747\u5728\u6c34\u5e73\u6216\u5782\u76f4\u7684\u7089\u7ba1\u4e2d\u8fdb\u884c\u3002
\na.\u6dc0\u79ef:\u9884\u6dc0\u79ef\uff08predeposition\u3001dep\u3001predep\uff09\uff0c\u53d7\u5236\u7ea6\u56e0\u7d20\u4e00\u662f\u7279\u5b9a\u6742\u8d28\u7684\u6269\u6563\u7387\uff08diffusivity\uff09\uff0c\u53e6\u4e00\u4e2a\u56e0\u7d20\u662f\u6742\u8d28\u5728\u6676\u5706\u6750\u8d28\u4e2d\u7684\u6700\u5927\u56fa\u6d53\u5ea6\uff08maximum solid solubility\uff09\uff0c\u8fd8\u6709\u4e00\u4e2a\u5c31\u662f\u6e29\u5ea6\u53ca\u63ba\u6742\u6e90\u6750\u6599\uff1b
\nb.\u6dc0\u79ef\u6b65\u9aa4\uff1a\u9884\u6e05\u6d17\u4e0e\u523b\u8680\u2014\u7089\u7ba1\u6dc0\u79ef\u2014\u53bb\u91c9\u2014\u8bc4\u4f30\uff1b
\nc.\u6269\u6563\u6e90\uff1a\u6db2\u6001\u6e90\uff08BBr3\u3001POCl3\u2026\uff09\u3001\u6c14\u6001\u6e90\uff08AsH3\u3001B2H6\u2026\uff09\u3001\u56fa\u6001\u6e90\uff08\u5319\u3001\u8fd1\u90bb\u56fa\u6001\u6e90solid neighbor source\u3001\u65cb\u8f6c\u6d82\u62b9\uff09\uff1b
\nd.\u5c01\u95ed\u7089\u7ba1\u6dc0\u79ef\uff1aIBM\u5f00\u53d1\u7684\uff0c\u5728\u62bd\u771f\u7a7a\u3001\u5bc6\u5c01\u4f4e\u538b\u7684\u77f3\u82f1\u8231\u4e2d\u8fdb\u884c\u6dc0\u79ef\uff0c\u6210\u672c\u592a\u9ad8\uff1b
\ne.\u63a8\u8fdb\u6c27\u5316\uff1a\u63a8\u8fdb\uff08drive-in\uff09\u3001\u6269\u6563\uff08diffusion\uff09\u3001\u518d\u6c27\u5316\uff08reoxidation\u3001reox\uff09\u4f5c\u7528\u5982\u4e0b:
\n\u25a0\u6742\u8d28\u5728\u6676\u5706\u4e2d\u5411\u6df1\u5904\u7684\u518d\u5206\u5e03\uff1b
\n\u25a0\u6c27\u5316\u6676\u5706\u7684\u66b4\u9732\u8868\u9762\uff1b
\nf.\u6c27\u5316\u7684\u5f71\u54cd\uff1aN\u578b\u7684\u5806\u79ef\u6548\u5e94\uff08pile-up\uff09\u548cP\u578b\u7684\u8017\u5c3d\u6548\u5e94\uff1b
\n4\u3001\u79bb\u5b50\u6ce8\u5165\uff1a\u4f20\u7edf\u70ed\u6269\u6563\u5bf9\u5148\u8fdb\u7535\u8def\u7684\u751f\u4ea7\u6709\u6240\u9650\u5236\uff0c\u96c6\u4e2d\u5728\u4ee5\u4e0b\u4e94\u4e2a\u95ee\u9898\uff1a\u6a2a\u5411\u6269\u6563\u3001\u8d85\u6d45\u7ed3\u3001\u7c97\u52a3\u7684\u63ba\u6742\u63a7\u5236\u3001\u8868\u9762\u6c61\u67d3\u7684\u963b\u788d\u548c\u9519\u4f4d\u7684\u4ea7\u751f\u3002\u79bb\u5b50\u6ce8\u5165\u514b\u670d\u4e86\u6269\u6563\u7684\u9650\u5236\uff0c\u540c\u65f6\u4e5f\u63d0\u4f9b\u4e86\u989d\u5916\u7684\u4f18\u52bf\u3002
\na.\u79bb\u5b50\u6ce8\u5165\u7684\u6982\u5ff5\uff1a\u6269\u6563\u662f\u5316\u5b66\u8fc7\u7a0b\uff0c\u79bb\u5b50\u6ce8\u5165\u662f\u7269\u7406\u8fc7\u7a0b\uff0c\u4e0d\u4f9d\u8d56\u4e8e\u6742\u8d28\u4e0e\u6676\u5706\u6750\u8d28\u7684\u53cd\u5e94\uff0c\u7c7b\u4f3c\u706b\u70ae\u5c06\u70ae\u5f39\u6253\u5165\u5899\u4e2d\uff1b
\nb.\u79bb\u5b50\u6ce8\u5165\u7cfb\u7edf\uff1a\u4e00\u53f0\u79bb\u5b50\u6ce8\u5165\u673a\u662f\u591a\u4e2a\u6781\u4e3a\u590d\u6742\u7cbe\u5bc6\u7684\u5206\u7cfb\u7edf\u7684\u96c6\u6210\u3002\u79bb\u5b50\u6ce8\u5165\u673a\u53ef\u5206\u4e3a\uff1a\u4e2d\u7b49\u675f\u6d41\u548c\u9ad8\u675f\u6d41\u8bbe\u5907\uff08\u6676\u5706\u7535\u8377\u79ef\u7d2f\u95ee\u9898\uff09\u3001\u9ad8\u80fd\u91cf\u4e0e\u6c27\u79bb\u5b50\u6ce8\u5165\u673a\u7b49\uff1b
\n5\u3001\u79bb\u5b50\u6ce8\u5165\u7cfb\u7edf\u7ec4\u6210\uff1a
\na.\u79bb\u5b50\u6ce8\u5165\u6e90\uff1a\u6c14\u6001\u4e3a\u4e3b\uff08PF5\u3001AsF5\u3001BF3\u3001SbF3\u3001PF3\u2026\uff09\uff0c\u5076\u5c14\u6709\u56fa\u6001\u6e90\uff08P2O5\uff09\uff1b
\nb.\u79bb\u5316\u53cd\u5e94\u5ba4\uff1a\u79bb\u5316\u53cd\u5e94\u8154\u4e2d\u8fdb\u884c\uff0c\u6216\u8005\u91c7\u7528\u51b7\u9634\u6781\u7684\u65b9\u6cd5\uff1b
\nc.\u8d28\u8c31\u5206\u6790\u548c\u79bb\u5b50\u9009\u62e9\uff1a\u5206\u6790\uff08analyzing\uff09\u3001\u8d28\u8c31\u5206\u6790\uff08mass analyzing\uff09\u3001\u9009\u62e9\uff08selection\uff09\u3001\u79bb\u5b50\u5206\u79bb\uff08ion separation\uff09\uff1b
\nd.\u52a0\u901f\u7ba1\uff1a\u5c06\u79bb\u5b50\u52a0\u901f\u5230\u8db3\u591f\u9ad8\u901f\u5ea6\u83b7\u53d6\u9ad8\u52a8\u91cf\uff08momentum\uff09\u4ee5\u7a7f\u900f\u6676\u5706\u8868\u9762\uff1b
\ne.\u675f\u6d41\u805a\u7126\uff1a\u7528\u9759\u7535\u6216\u78c1\u900f\u955c\u5c06\u79bb\u5b50\u805a\u7126\u4e3a\u5c0f\u5c3a\u5bf8\u675f\u6d41\u6216\u5e73\u884c\u675f\u6d41\u5e26\uff1b
\nf.\u675f\u6d41\u4e2d\u548c\uff1a\u6291\u5236\u4e2d\u6027\u7c92\u5b50\u6d41\u7684\u65b9\u6cd5\u662f\u901a\u8fc7\u9759\u7535\u573a\u677f\u7684\u65b9\u6cd5\uff1b
\ng.\u675f\u6d41\u626b\u63cf\u3001\u673a\u68b0\u626b\u63cf\u548c\u6a21\u677f\uff0c\u4e00\u822c\u7528\u524d\u4e8c\u8005\u7ed3\u5408\u7684\u65b9\u5f0f\uff1b
\nh\uff0e\u9776\u5ba4\uff1a\u53c8\u79f0\u4e3a\u7ec8\u7aef\u8231\u5ba4\uff0c\u5305\u62ec\u626b\u63cf\u7cfb\u7edf\u4e0e\u8fdb\u51fa\u673a\u68b0\u88c5\u7f6e
\n6\u3001\u79bb\u5b50\u6ce8\u5165\u63a9\u819c\uff1a\u79bb\u5b50\u6ce8\u5165\u7684\u4e00\u4e2a\u4f18\u70b9\u662f\u591a\u79cd\u7c7b\u578b\u7684\u63a9\u819c\u90fd\u53ef\u4ee5\u6709\u6548\u5730\u963b\u6b62\u79bb\u5b50\u675f\u6d41\uff0c\u4f7f\u7528\u5149\u523b\u80f6\u8584\u819c\u800c\u4e0d\u662f\u523b\u8680\u5f00\u7684\u6c27\u5316\u5c42\u4f5c\u4e3a\u63a9\u819c\u63d0\u4f9b\u4e86\u4e0e\u5782\u76f4\u5de5\u827a\u76f8\u540c\u7684\u5c3a\u5bf8\u63a7\u5236\u4f18\u52bf\uff0c\u53d6\u6d88\u4e86\u523b\u8680\u6b65\u9aa4\u4ee5\u53ca\u5b83\u6240\u5f15\u5165\u7684\u53d8\u5316\uff1b
\n7\u3001\u79bb\u5b50\u6ce8\u5165\u533a\u57df\u7684\u6742\u8d28\u6d53\u5ea6\uff1a\u539f\u5b50\u6570\u91cf\u7531\u675f\u6d41\u5bc6\u5ea6\u3001\u548c\u6ce8\u5165\u65f6\u95f4\u51b3\u5b9a\uff0c\u5176\u5177\u4f53\u4f4d\u7f6e\u4e0e\u79bb\u5b50\u80fd\u91cf\u3001\u6676\u5706\u53d6\u5411\u3001\u79bb\u5b50\u7684\u505c\u6b62\u673a\u5236\u6709\u5173\uff0c\u505c\u6b62\u673a\u5236\u57fa\u4e8e\u6676\u4f53\u5185\u90e8\u5e26\u8d1f\u7535\u7684\u7535\u5b50\u7684\u51cf\u901f\u4ee5\u53ca\u4e0e\u6676\u5706\u539f\u5b50\u6838\u7684\u78b0\u649e\u7684\u4ea4\u4e92\u4f5c\u7528\uff0c\u7531\u6b64\u5e26\u6765\u7684\u95ee\u9898\u662f\uff1a
\na.\u6676\u4f53\u635f\u4f24\uff1a\u6676\u683c\u635f\u4f24\u3001\u635f\u4f24\u7fa4\u7c07\u3001\u7a7a\u4f4d-\u95f4\u9699\uff1b
\nb.\u9000\u706b\uff1a\u53ef\u4fee\u590d\u6676\u4f53\u635f\u4f24\u548c\u6ce8\u5165\u6742\u8d28\u7684\u7535\u6fc0\u6d3b\uff0c\u91c7\u7528RTP\u6280\u672f\uff1b
\nc.\u6c9f\u9053\u6548\u5e94\uff1a\u53ef\u901a\u8fc7\u4ee5\u4e0b\u51e0\u79cd\u6280\u672f\u6700\u5c0f\u5316\uff1a\u8868\u5c42\u7684\u4e0d\u5b9a\u578b\u963b\u788d\u5c42\u3001\u6676\u5706\u65b9\u5411\u7684\u626d\u8f6c\u3001\u4ee5\u53ca\u5728\u6676\u5706\u8868\u9762\u5f62\u6210\u635f\u4f24\u5c42\uff1b
\n8\u3001\u79bb\u5b50\u6ce8\u5165\u7684\u8bc4\u4f30\uff1a
\na.\u56db\u63a2\u9488\u6d4b\u8bd5\u4eea\u7528\u4e8e\u6d4b\u8bd5\u8be5\u5c42\u7684\u65b9\u5757\u7535\u963b\uff08\u6269\u6563\u7535\u963b\u6280\u672f\u3001\u5bb9-\u538b\u6280\u672f\u3001\u51b3\u5b9a\u5256\u9762\u6d53\u5ea6\u3001\u5242\u91cf\u548c\u7ed3\u6df1\uff09\uff0c\u7ed3\u6df1\u4e5f\u53ef\u4ee5\u7528\u659c\u89d2\u67d3\u8272\u6cd5\u6765\u51b3\u5b9a\uff1b
\nb.\u5bf9\u4e8e\u6ce8\u5165\u5c42\uff0c\u4e00\u79cd\u88ab\u79f0\u4e3aVan Der Pauw\u7ed3\u6784\u7684\u7279\u6b8a\u7ed3\u6784\u6709\u65f6\u88ab\u7528\u6765\u66ff\u4ee3\u56db\u63a2\u9488\u6d4b\u8bd5\u4eea\uff1b
\nc.\u79bb\u5b50\u6ce8\u5165\u7684\u7279\u6b8a\u6d4b\u8bd5\u6280\u672f\u662f\u5149\u5b66\u5242\u91cf\u6d4b\u5b9a\uff0c\u8981\u6c42\u65cb\u8f6c\u6d82\u6709\u5149\u523b\u80f6\u7684\u5706\u76d8\u5f62\u6210\u7b49\u9ad8\u7ebf\u56fe\uff1b
\n9\u3001\u79bb\u5b50\u6ce8\u5165\u7684\u5e94\u7528\uff1a\u79bb\u5b50\u6ce8\u5165\u53ef\u6210\u4e3a\u4efb\u4f55\u6dc0\u79ef\u7684\u66ff\u4ee3\u5de5\u827a\uff0c\u4e00\u4e2a\u7279\u522b\u7684\u6311\u6218\u662f\u8d85\u6d45\u7ed3\uff0c\u4e00\u4e2a\u4e3b\u8981\u5e94\u7528\u662fMOS\u6805\u9600\u503c\u7535\u538b\u7684\u8c03\u6574\u3002\u5728\u53cc\u6781\u6280\u672f\u4e2d\u79bb\u5b50\u6ce8\u5165\u88ab\u7528\u6765\u5f62\u6210\u5404\u79cd\u6676\u4f53\u7ba1\u90e8\u4ef6\uff0c\u79bb\u5b50\u6ce8\u5165\u9002\u5408MOS\u548c\u53cc\u6781\u7535\u8def\u4e2d\u7684\u7535\u963b\u5f62\u6210\u3002
\n10\u3001\u63ba\u6742\u7684\u524d\u666f\u5c55\u671b\uff1a\u4e00\u79cd\u65b0\u6280\u672f\u662f\u7b49\u79bb\u5b50\u63ba\u6742\uff08plasma doping\uff09\uff0c\u4e5f\u79f0\u4e3aPLAD\uff0c\u76ee\u524d\u4e3a\u6b62\u79bb\u5b50\u6ce8\u5165\u5c06\u534a\u5bfc\u4f53\u5de5\u4e1a\u5e26\u5165\u4e9a0.10\u5fae\u7c73\u7684\u63ba\u6742\u6280\u672f\uff0c\u5176\u597d\u5904\u6709\uff1a
\n\u25a010\u768410\u6b21\u65b9\u81f316\u6b21\u65b9\u6bcf\u5e73\u65b9\u5398\u7c73\u8303\u56f4\u5185\u7684\u7cbe\u786e\u5242\u91cf\u63a7\u5236\uff1b
\n\u25a0\u5927\u9762\u79ef\u533a\u57df\u7684\u5747\u5300\u6027\uff1b
\n\u25a0\u901a\u8fc7\u80fd\u91cf\u7684\u9009\u62e9\u63a7\u5236\u6742\u8d28\u7684\u5206\u5e03\u5256\u9762\uff1b
\n\u25a0\u8f83\u5bb9\u6613\u5730\u6ce8\u5165\u6240\u6709\u6742\u8d28\u5143\u7d20\uff1b
\n\u25a0\u6700\u5c0f\u5316\u7684\u4fa7\u5411\u6269\u6563\uff1b
\n\u25a0\u6ce8\u5165\u975e\u63ba\u6742\u539f\u5b50\uff1b
\n\u25a0\u53ef\u900f\u8fc7\u8868\u9762\u5c42\u6ce8\u5165\uff1b
\n\u25a0\u5bf9\u4e8e\u4e0d\u540c\u7684\u63ba\u6742\u53ef\u9009\u62e9\u4e0d\u540c\u7684\u63a9\u819c\u6750\u8d28\uff1b
\n\u25a0\u6df1\u9631\u533a\uff08\u5012\u9000\u533a\uff09\u7684\u7279\u522b\u5206\u5e03\u5256\u9762\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"
1\u3001\u7ed3\u7684\u5b9a\u4e49\uff1a\u7ed3\uff08junction\uff09\u5c31\u662f\u5bcc\u542b\u7535\u5b50\u533a\u57df\uff08N\u578b\u533a\uff09\u4e0e\u5bcc\u542b\u7a7a\u7a74\u533a\u57df\uff08P\u578b\u533a\uff09\u7684\u5206\u754c\u5904\uff0c\u5177\u4f53\u4f4d\u7f6e\u5c31\u662f\u7535 […]<\/p>\n","protected":false},"author":1,"featured_media":3425,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[5],"tags":[686,87],"_links":{"self":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts\/369"}],"collection":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/comments?post=369"}],"version-history":[{"count":0,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts\/369\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/media\/3425"}],"wp:attachment":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/media?parent=369"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/categories?post=369"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/tags?post=369"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}