1\u3001ULSI\/VLSI\u96c6\u6210\u7535\u8def\u56fe\u5f62\u5904\u7406\u8fc7\u7a0b\u4e2d\u5b58\u5728\u7684\u95ee\u9898\uff1a
\n\u5149\u5b66\u66dd\u5149\u8bbe\u5907\u7684\u7269\u7406\u5c40\u9650\u3001\u5149\u523b\u80f6\u5206\u8fa8\u7387\u7684\u9650\u5236\u3001\u8bb8\u591a\u4e0e\u6676\u7247\u8868\u9762\u6709\u5173\u7684\u95ee\u9898\uff1b
\n\u4f7f\u7528\u5149\u5b66\u5149\u523b\u6280\u672f\u89e3\u67900.5\u5fae\u7c73\u548c0.3\u5fae\u7c73\u7684\u56fe\u5f62\u9700\u8981\u5bf9\u865a\u50cf\uff08aerial images\uff09\u6709\u5f88\u597d\u7684\u63a7\u5236\uff0c\u63a7\u5236\u65b9\u6cd5\u4e3b\u8981\u4ece\u4e09\u4e2a\u65b9\u9762\u5165\u624b\uff1a\u5149\u5b66\u7cfb\u7edf\u5206\u8fa8\u7387\u3001\u5149\u523b\u80f6\u5206\u8fa8\u7387\u548c\u6676\u7247\u8868\u9762\u95ee\u9898\uff0c\u7b2c\u56db\u4e2a\u65b9\u9762\u662f\u523b\u8680\u56fe\u5f62\u5b9a\u4e49\u95ee\u9898\uff1b
\n2\u3001\u5149\u5b66\u7cfb\u7edf\u5206\u8fa8\u7387\u63a7\u5236\uff1a\uff08\u5149\u523b\u5206\u8fa8\u7387\u5de5\u827a\u8def\u7ebf\u56fe\uff09
\nI\u7ebf\u2192I\u7ebf+ARI\u2192I\u7ebf+OAI\/\u6df1\u7d2b\u5916\u5149\/\u6df1\u7d2b\u5916\u5149+OAI\u6216PSM\u2192I\u7ebf+ OAI\u6216PSM\/\u6df1\u7d2b\u5916\u5149+ARI\u6216OAI\u2192I\u7ebf+PSM\/\u6df1\u7d2b\u5916\u5149+OAI\u6216PSM\u2192\u6df1\u7d2b\u5916\u5149+PSM\uff08\u6700\u5c0f\u5206\u8fa8\u7387\u51cf\u5c0f\uff0cARI\u73af\u5f62\u706f\u5149\u6e90\u3001OAI\u504f\u8f74\u5149\u6e90\u3001PSM\u76f8\u4f4d\u504f\u79fb\u63a9\u819c\uff09
\na.\u6539\u8fdb\u7684\u66dd\u5149\u6e90\uff1a\u7d2b\u5916\u5149UV\u548c\u6df1\u7d2b\u5916\u5149DUV\uff0c\u6c5e\u706f\uff08I\u7ebf365nm\u00a0 H\u7ebf405nm\u00a0 G\u7ebf436nm \u4e2d\u7d2b\u5916\u7ebf313nm\u3001\u6df1\u7d2b\u5916\u7ebf245nm\uff09\uff1b
\nb.\u53d7\u6fc0\u51c6\u5206\u5b50\u6fc0\u5149\u5668\uff1aXeF 351nm\u00a0 XeCl 308nm\u00a0 RF 248nm\u00a0 AF 193nm\uff1b
\nc.\u805a\u7126\u79bb\u5b50\u675f\uff1a\u7cfb\u7edf\u7a33\u5b9a\u6027\u975e\u5e38\u5dee\uff1b
\nd.X\u5c04\u7ebf\uff1a\u9700\u8981\u7279\u5236\u63a9\u819c\u7248\uff08\u91d1\u505a\u963b\u6321\u5c42\uff09\u3001\u6210\u672c\u975e\u5e38\u9ad8\uff1b
\ne.\u7535\u5b50\u675f\uff1a\u7535\u5b50\u675f\u5149\u523b\u662f\u4e00\u95e8\u6210\u719f\u7684\u6280\u672f\uff0c\u65e0\u9700\u63a9\u819c\u7248\uff0c\u76f4\u63a5\u4e66\u5199\uff08direct writing\uff09\uff0c\u5149\u523b\u80f6\u66dd\u5149\u987a\u5e8f\u5206\u4e3a\u5149\u6805\u5f0f\u548c\u77e2\u91cf\u5f0f\uff1b\u6210\u672c\u4e5f\u6bd4\u8f83\u9ad8
\n3\u3001\u5176\u4ed6\u66dd\u5149\u95ee\u9898\uff1a
\na.\u955c\u5934\u7684\u6570\u503c\u5b54\u5f84\uff08NA\uff09\u3001\u53ef\u53d8\u6570\u503c\u5b54\u5f84\u900f\u955c\uff08\u666f\u6df1DOF\u548c\u89c6\u91ce\uff09\u3001\u79bb\u8f74\u5149\u7ebf\uff1b
\nb.\u5bf9\u6bd4\u6548\u5e94\u3001\u666f\u7269\u53cd\u5dee\uff1b
\nc.\u5468\u76f8\u79fb\u52a8\u63a9\u819c\u7248\uff08PSM\uff09\u3001\uff08\u4ea4\u4e92\u72ed\u7f1dAAPSM\u3001\u4e9a\u5206\u8fa8\u7387\u53ca\u9576\u8fb9\uff09\u5468\u5411\u79fb\u52a8\u63a9\u819c\u7248\uff1b
\nd.\u5149\u5b66\u4e34\u8fd1\u7ea0\u504f\u63a9\u819c\u7248\uff08OPC\uff09 \uff1b
\ne.\u73af\u5b54\u7167\u5c04\uff08annular ring illumination\uff09\uff1b
\n4\u3001\u63a9\u819c\u7248\u8584\u819c\uff08pellicle\uff09\uff1a
\n\u662f\u4e00\u5c42\u5728\u6846\u67b6\u4e0a\u62c9\u4f38\u5e73\u94fa\u7684\u65e0\u8272\u6709\u673a\u805a\u5408\u7269\u8584\u819c\uff0c\u7528\u785d\u5316\u7ea4\u7ef4NC\u6216\u918b\u9178\u7ea4\u7ef4AC\u5236\u6210\uff1b
\n5\u3001\u6676\u5706\u8868\u9762\u95ee\u9898\uff1a\uff08\u8868\u9762\u7684\u53cd\u5c04\u7387\u3001\u8868\u9762\u5730\u5f62\u5dee\u5f02\u3001\u591a\u5c42\u523b\u8680\u7b49\u7b49\uff09
\na.\u5149\u523b\u80f6\u7684\u5149\u6563\u5c04\u73b0\u8c61\uff1a
\nb.\u5149\u523b\u80f6\u91cc\u9762\u7684\u5149\u53cd\u5c04\u73b0\u8c61\uff1b
\nc.\u9632\u53cd\u5c04\u6d82\u5c42\uff08ARC\uff09\/\u4e0a\u6d82\u9632\u53cd\u5c04\u5c42\uff08TAR\uff09
\nd.\u9a7b\u6ce2\u95ee\u9898\uff0c\u7528PEB\u66dd\u5149\u540e\u70d8\u7119\u3001\u67d3\u8272\u5242\u3001\u9632\u53cd\u5c04\u6d82\u5c42\u7b49\u65b9\u5f0f\u6539\u5584\uff1b
\ne.\u5e73\u6574\u5316\uff1a\u89e3\u51b3\u666f\u6df1\u95ee\u9898\uff0c\u89e3\u51b3\u9636\u68af\u5904\u7531\u5149\u53cd\u5c04\u9020\u6210\u7684\u91d1\u5c5e\u56fe\u5f62\u51f9\u53e3\u7b49\u95ee\u9898\uff1b
\n6\u3001\u5148\u8fdb\u7684\u5149\u523b\u80f6\u5de5\u827a\uff1a
\na.\u590d\u5c42\u5149\u523b\u80f6\/\u8868\u9762\u6210\u50cf\uff1a\u53cc\u5c42\u6216\u4e09\u5c42\u5149\u523b\u80f6\u5de5\u827a\uff0c\u4fbf\u643a\u5f0f\u5171\u5f62\u5c42\uff08portable conformal layer\uff09\uff1b
\nb.\u7845\u70f7\u5316\u4f5c\u7528\/DESIRE\u5de5\u827a\uff1a\u6269\u6563\u52a0\u5f3a\u7845\u70f7\u5316\u5149\u523b\u80f6\uff0c\u7845\u70f7\u5316\u53cd\u5e94\uff08silyation process\uff09\u3001\u9876\u9762\u6210\u50cf\uff08TSI, top surface image\uff09\uff1b
\nc.\u805a\u9170\u4e9a\u80fa\u5e73\u6574\u5c42\uff1b
\nd.\u56de\u523b\u5e73\u6574\uff1b
\ne.\u94dc\u5236\u7a0b\u5de5\u827a\uff1a\u94dc\u5236\u7a0bdual damascene\uff1b
\nf.\u5316\u5b66\u673a\u68b0\u7814\u78e8\uff1a
\n\u25a0\u53ef\u4ee5\u8fbe\u5230\u6676\u5706\u8868\u9762\u6574\u4f53\u5e73\u6574\u5316\uff1b
\n\u25a0\u7814\u78e8\u79fb\u53bb\u6240\u6709\u8868\u9762\u7269\u8d28\uff1b
\n\u25a0\u9002\u7528\u4e8e\u591a\u79cd\u7269\u8d28\u8868\u9762\uff1b
\n\u25a0\u4f7f\u9ad8\u8d28\u91cf\u7684\u94dc\u5236\u7a0b\u548c\u94dc\u5316\u91d1\u5c5e\u5c42\u79f0\u4e3a\u53ef\u80fd\uff1b
\n\u25a0\u907f\u514d\u4f7f\u7528\u6709\u6bd2\u6c14\u4f53\uff1b
\n\u25a0\u8d39\u7528\u4f4e
\n7\u3001\u5316\u5b66\u673a\u68b0\u7814\u78e8\uff08CMP\uff09:
\n\u4e3b\u8981\u53c2\u6570\u5982\u4e0b\uff1a\u7814\u78e8\u57ab\u7684\u6784\u6210\u3001\u7814\u78e8\u57ab\u7684\u538b\u529b\u3001\u7814\u78e8\u57ab\u65cb\u8f6c\u901f\u5ea6\u3001\u673a\u53f0\u65cb\u8f6c\u901f\u5ea6\u3001\u78e8\u7c89\u6d46\u7684\u6d41\u901f\u3001\u78e8\u7c89\u6d46\u7684\u5316\u5b66\u6210\u5206\u3001\u78e8\u7c89\u6d46\u7684\u7269\u8d28\u9009\u62e9\u6027\u3001\u8868\u9762\u7269\u8d28\u3001\u51e0\u4f55\u56fe\u5f62\uff1b
\n\u8861\u91cf\u5316\u5b66\u673a\u68b0\u7814\u78e8\u7684\u4e3b\u8981\u6307\u6807\uff1a\u8868\u9762\u673a\u68b0\u6761\u4ef6\u3001\u8868\u9762\u5316\u5b66\u6027\u8d28\u3001\u8868\u9762\u6d01\u51c0\u5ea6\u3001\u751f\u4ea7\u7387\u3001\u8d39\u7528\uff1b
\na.\u7814\u78e8\u57ab\uff1a\u7531\u94f8\u578b\u7528\u805a\u4e9a\u6c28\u916f\u6ce1\u6cab\u6750\u6599\u548c\u586b\u6599\u3001\u805a\u4e9a\u80fa\u916f\u586b\u5145\u57ab\u7b49\u5236\u6210\uff0c\u5177\u6709\u591a\u5b54\u6027\u3001\u538b\u7f29\u6027\u548c\u786c\u5ea6\u7b49\u7279\u6027\uff1b
\nb.\u78e8\u7c89\u6d46\uff1a\u7ec6\u5c0f\u7684\u7845\u77f3\u3001\u4e09\u6c27\u5316\u4e8c\u7845\u3001\u6dfb\u52a0\u5242\u7b49\uff0c\u5173\u952e\u53c2\u6570\u662fPH\u503c\u3001\u6d41\u52a8\u529b\u5b66\u53c2\u6570\u548c\u78e8\u7c89\u6d46\u523b\u8680\u9009\u62e9\u6027\uff1b
\nc.\u7814\u78e8\u901f\u5ea6\uff1a\u4e3b\u8981\u5f71\u54cd\u56e0\u7d20\u6709\u7814\u78e8\u57ab\u7684\u53c2\u6570\u3001\u78e8\u7c89\u6d46\u7684\u79cd\u7c7b\u548c\u78e8\u7c89\u5c3a\u5bf8\u3001\u78e8\u7c89\u6d46\u5316\u5b66\u7ec4\u6210\u7b49\uff1b
\nd.\u5e73\u6574\u6027\uff1a\u968f\u7740\u591a\u5c42\u91d1\u5c5e\u8bbe\u8ba1\u7684\u91c7\u7528\uff0c\u5e73\u6574\u6027\u5e76\u4e0d\u6613\u8fbe\u5230\uff0c\u94dc\u3001\u94a8\u8fde\u63a5\u67f1\u3001\u94bd\u3001IDL\u7b49\u6311\u6218\uff1b
\ne.\u5316\u5b66\u7814\u78e8\u540e\u7684\u6e05\u6d17\uff1a\u673a\u68b0\u5237\u62c2\u53bb\u6216\u7528\u9ad8\u538b\u6c34\u67f1\u51b2\u53bb\uff0c\u5316\u5b66\u6e05\u6d01\u4e00\u822c\u91c7\u7528\u4e0e\u5176\u5b83FEOL\u6e05\u6d17\u76f8\u540c\u7684\u6280\u672f\uff0c\u9700\u7279\u522b\u6ce8\u610f\u94dc\u6c61\u67d3\uff1b
\nf.CMP\u8bbe\u5907\uff1a\u6676\u5706\u642c\u8fd0\u673a\u68b0\u624b\u3001\u5728\u7ebf\u6d4b\u91cf\u548c\u6d01\u51c0\u5ea6\u76d1\u6d4b\u88c5\u7f6e\uff0c\u76ee\u6807\u662f\u201c\u5e72\u8fdb\u5e72\u51fa\u201d\uff1b
\n8\u3001\u5316\u5b66\u673a\u68b0\u7814\u78e8\uff08CMP\uff09\u76f8\u5173\uff1a
\na.\u56de\u6d41\uff1a \u7845\u9178\u787c\u73bb\u7483\uff08BSG\uff09\u3001\u65cb\u6d82\u73bb\u7483\u5c42\uff08SOG\uff09\uff1b
\nb.\u53cc\u63a9\u819c\u7248\u9632\u6b62\u9488\u5b54\u7f3a\u9677\uff1b
\nc.\u56fe\u50cf\u53cd\u8f6c\uff1b
\nd.\u5bf9\u6bd4\u589e\u5f3a\u5c42\uff08CEL\uff09\uff1a\u964d\u4f4e\u5bf9\u6bd4\u9600\u503c\uff08contrast\u00a0 threshold\uff09\uff1b
\ne.\u67d3\u8272\u5149\u523b\u80f6\uff1a\u5438\u6536\u8f90\u5c04\u5149\u7ebf\u3001\u6d88\u5f31\u53cd\u5c04\u5149\u5f71\u54cd\u3001\u51cf\u5c0f\u9a7b\u6ce2\u6548\u5e94\u3001\u6539\u53d8\u663e\u5f71\u65f6\u5149\u523b\u80f6\u805a\u5408\u7269\u7684\u5206\u89e3\u7387\uff1b
\n9\u3001\u6539\u8fdb\u523b\u8680\u5de5\u827a\uff1a
\n\u5e95\u57fa\u5265\u79bb\u5de5\u827a\u3001\u81ea\u5bf9\u51c6\u7ed3\u6784\uff08self-aligned structure\uff09\u3001\u523b\u8680\u8f6e\u5ed3\u63a7\u5236\uff1b
\n10\u3001\u5149\u5b66\u5149\u523b\u7684\u524d\u666f\uff1a
\n\u7531\u4e8eX\u5c04\u7ebf\u548c\u7535\u5b50\u675f\u5149\u523b\u6280\u672f\u7684\u8d39\u7528\u6602\u8d35\uff0c\u5149\u5b66\u7cfb\u7edf\u53ef\u6301\u7eed\u6539\u8fdb\u4ee5\u6ee1\u8db3\u66f4\u5c0f\u56fe\u5f62\u5c3a\u5bf8\u7684\u8981\u6c42\uff0c\u5728\u65e0\u5149\u5b66\u7cfb\u7edf\u6280\u672f\u5360\u9886\u534a\u5bfc\u4f53\u4ee5\u524d\uff0c\u201c\u4e9a\u6df1\u7d2b\u5916\u7ebf\u201d\u53ef\u80fd\u4f1a\u6210\u4e3a\u4e0b\u4e00\u4e2a\u91cd\u8981\u7684\u5149\u5b66\u5149\u523b\u6280\u672f\u8fdb\u6b65\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"
1\u3001ULSI\/VLSI\u96c6\u6210\u7535\u8def\u56fe\u5f62\u5904\u7406\u8fc7\u7a0b\u4e2d\u5b58\u5728\u7684\u95ee\u9898\uff1a \u5149\u5b66\u66dd\u5149\u8bbe\u5907\u7684\u7269\u7406\u5c40\u9650\u3001\u5149\u523b\u80f6\u5206\u8fa8\u7387\u7684\u9650\u5236\u3001\u8bb8\u591a\u4e0e\u6676 […]<\/p>\n","protected":false},"author":1,"featured_media":3425,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[5],"tags":[686,72],"_links":{"self":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts\/322"}],"collection":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/comments?post=322"}],"version-history":[{"count":0,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts\/322\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/media\/3425"}],"wp:attachment":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/media?parent=322"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/categories?post=322"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/tags?post=322"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}