1\u3001\u663e\u5f71\uff1a\u901a\u8fc7\u5bf9\u672a\u805a\u5408\u5149\u523b\u80f6\u7684\u5316\u5b66\u5206\u89e3\u6765\u4f7f\u56fe\u6848\u663e\u5f71\uff0c\u663e\u5f71\u6280\u672f\u88ab\u8bbe\u8ba1\u6210\u4f7f\u4e4b\u628a\u5b8c\u5168\u4e00\u6837\u7684\u63a9\u819c\u7248\u56fe\u6848\u590d\u5236\u5230\u5149\u523b\u80f6\u4e0a\u3002
\na.\u8d1f\u5149\u523b\u80f6\u663e\u5f71\uff1a\u4e8c\u7532\u82ef\u6216stoddart\u6eb6\u5242\u663e\u5f71\uff0cn-\u4e01\u57fa\u918b\u9178\u76d0\u51b2\u6d17\uff1b
\nb.\u6b63\u5149\u523b\u80f6\u663e\u5f71\uff1a\u78b1\uff08\u6c22\u6c27\u5316\u94a0\u6216\u6c22\u6c27\u5316\u94be\uff09+\u6c34\u6eb6\u6db2\u3001\u6216\u53e0\u6c2e\u5316\u56db\u7532\u57fa\u94f5\u6c22\u6c27\u5316\u7269\u7684\u6eb6\u6db2\uff08TMAH\uff09;
\nc.\u6e7f\u6cd5\u663e\u5f71\uff1a
\n\u6c89\u6d78-\u589e\u52a0\u9644\u5c5e\u65b9\u6cd5\u63d0\u9ad8\u663e\u5f71\u5de5\u827a\uff0c\u673a\u68b0\u6405\u52a8\u3001\u8d85\u58f0\u6ce2\u6216\u78c1\u58f0\u6ce2\u7b49\uff1b
\n\u55b7\u5c04-\u5bf9\u8d1f\u80f6\u800c\u8a00\u662f\u6807\u51c6\u5de5\u827a\uff0c\u5bf9\u6e29\u5ea6\u654f\u611f\u7684\u6b63\u80f6\u5374\u4e0d\u662f\u5f88\u6709\u6548\uff0c\u9694\u70ed\u51b7\u5374\uff08adiabatic cooling\uff09\uff1b
\n\u6df7\u51dd-\u662f\u7528\u4ee5\u83b7\u5f97\u6b63\u80f6\u55b7\u5c04\u663e\u5f71\u5de5\u827a\u4f18\u70b9\u7684\u4e00\u79cd\u5de5\u827a\u53d8\u5316\uff1b
\n\u7b49\u79bb\u5b50\u53bb\u9664\u6d6e\u6e23-\u4e0d\u5b8c\u5168\u663e\u5f71\u9020\u6210\u7684\u4e00\u4e2a\u7279\u4fd7\u56f0\u96be\u53eb\u505a\u6d6e\u6e23\uff08scumming\uff09\uff0c\u7528\u6c27\u7b49\u79bb\u5b50\u53bb\u9664\uff1b
\nd.\u5e72\u6cd5\uff08\u6216\u7b49\u79bb\u5b50\uff09\u663e\u5f71\uff1a\u5e72\u6cd5\u5149\u523b\u80f6\u663e\u5f71\u8981\u6c42\u5149\u523b\u80f6\u5316\u5b66\u7269\u7684\u66dd\u5149\u6216\u672a\u66dd\u5149\u7684\u90e8\u5206\u4e8c\u8005\u4e4b\u4e00\u6613\u4e8e\u88ab\u6c27\u7b49\u79bb\u5b50\u4f53\u53bb\u9664\uff0c\u6362\u8a00\u4e4b\u56fe\u6848\u7684\u90e8\u5206\u4ece\u6676\u5706\u8868\u9762\u4e0a\u6c27\u5316\u6389\uff0c\u4e00\u79cdDESIRE\u7684\u5e72\u6cd5\u663e\u5f71\u5de5\u827a\u4f1a\u4f7f\u7528\u7532\u57fa\u7845\u70f7\u548c\u6c27\u7b49\u79bb\u5b50\u4f53
\n2\u3001\u786c\u70d8\u7119\uff1a\u4e0e\u8f6f\u70d8\u7119\u4e00\u6837\u901a\u8fc7\u6eb6\u6db2\u7684\u84b8\u53d1\u6765\u56fa\u5316\u5149\u523b\u80f6\uff0c\u5e38\u89c1\u5de5\u827a\u6d41\u7a0b\u5982\u4e0b:
\n\u663e\u5f71\u2014\u68c0\u9a8c\u2014\u786c\u70d8\u7119\u2014\u523b\u8680\uff1b\u663e\u5f71\/\u70d8\u7119\u2014\u68c0\u9a8c\u2014\u523b\u8680\uff1b\u663e\u5f71\/\u70d8\u7119\u2014\u68c0\u9a8c\u2014\u91cd\u65b0\u70d8\u7119\u2014\u523b\u8680\uff1b
\n\u786c\u70d8\u7119\u6e29\u5ea6\u7684\u4e0a\u9650\u662f\u4ee5\u5149\u523b\u80f6\u6d41\u52a8\u70b9\u800c\u5b9a\uff0c\u9ad8\u6e29\u70d8\u7119\u4f1a\u4ea7\u751f\u8fb9\u7f18\u7ebf\u7b49\u4e0d\u826f\u73b0\u8c61\uff1b
\n3\u3001\u663e\u5f71\u68c0\u9a8c\uff08develop inspect\u00a0 DI\uff09\uff1a\u76ee\u7684\u662f\u533a\u5206\u90a3\u4e9b\u6709\u5f88\u4f4e\u53ef\u80fd\u6027\u901a\u8fc7\u6700\u7ec8\u63a9\u819c\u68c0\u9a8c\u7684\u6676\u5706\u3001\u63d0\u4f9b\u5de5\u827a\u6027\u80fd\u548c\u5de5\u827a\u63a7\u5236\u6570\u636e\u3001\u4ee5\u53ca\u5206\u62e3\u51fa\u9700\u8981\u91cd\u505a\u7684\u6676\u5706\uff1b
\na.\u6676\u5706\u88ab\u8fd4\u56de\u63a9\u819c\u5de5\u827a\u79f0\u4e3a\u91cd\u65b0\u5de5\u827a\u5904\u7406\uff08rework\u6216redo\uff09<10%\u00a0 5%\u6bd4\u8f83\u7406\u60f3
\nb.\u68c0\u9a8c\u65b9\u6cd5\uff1a\u4eba\u5de5\u68c0\u9a8c\uff081\u500d\u68c0\u9a8c\uff09\u3001\u663e\u5fae\u955c\u68c0\u9a8c\uff08\u968f\u673a\u62bd\u6837random sampling\uff09\u3001\u5173\u952e\u5c3a\u5bf8\uff08Critical Dimension\uff0cCD\uff09\u3001\u81ea\u52a8\u68c0\u9a8c
\nc.\u663e\u5f71\u68c0\u9a8c\u62d2\u6536\u7684\u539f\u56e0\uff1a\u68c0\u9a8c\u9075\u5faa\u201c\u9996\u5148-\u4e0d\u8db3\u201d\uff08first-fail\u00a0 basis\uff09\u539f\u7406
\n\u788e\u6676\u5706\u3001\u5212\u4f24\u3001\u6c61\u67d3\u3001\u5c0f\u5b54\u3001MA\u3001\u6865\u63a5\u3001\u4e0d\u5b8c\u5168\u663e\u5f71\u3001\u5149\u523b\u80f6\u7fd8\u8d77\u3001\u66dd\u5149\u4e0d\u8db3\u3001\u65e0\u5149\u523b\u80f6\u3001\u5149\u523b\u80f6\u6d41\u52a8\u3001\u4e0d\u6b63\u786e\u7684\u63a9\u819c\u7248\u3001CD\u2026\u2026
\n4\u3001\u523b\u8680\uff1a\u4e3b\u8981\u6709\u6e7f\u6cd5\u548c\u5e72\u6cd5\u523b\u8680\uff0c\u4e24\u79cd\u65b9\u6cd5\u7684\u4e3b\u8981\u76ee\u6807\u662f\u5c06\u5149\u523b\u63a9\u819c\u7248\u4e0a\u7684\u56fe\u6848\u7cbe\u786e\u5730\u8f6c\u79fb\u5230\u6676\u5706\u7684\u8868\u9762\uff0c\u5176\u4ed6\u523b\u8680\u5de5\u827a\u7684\u76ee\u6807\u5305\u62ec\u4e00\u81f4\u6027\u3001\u8fb9\u7f18\u8f6e\u5ed3\u63a7\u5236\u3001\u9009\u62e9\u6027\u3001\u6d01\u51c0\u5ea6\u548c\u6240\u6709\u6743\u6210\u672c\u6700\u4f4e\u5316\uff1b
\na.\u6e7f\u6cd5\u523b\u8680\uff1a\u5386\u53f2\u4e0a\u7684\u523b\u8680\u65b9\u6cd5\u4e00\u76f4\u662f\u4f7f\u7528\u6db2\u4f53\u523b\u8680\u5242\u6c89\u6d78\u7684\u6280\u672f\uff0c\u5bf9\u4e8e\u6676\u5706\u88ab\u523b\u8680\u5242\u6c61\u67d3\u7684\u62c5\u5fe7\u7531\u589e\u52a0\u51fa\u53e3\u8fc7\u6ee4\u5668\uff08point-of-use filter\uff09\u6765\u89e3\u51b3\uff1b\u4e0d\u5b89\u5b8c\u5168\u523b\u8680\u3001\u8fc7\u523b\u8680\uff08overetch\uff09\u3001\u5404\u5411\u5f02\u6027\u523b\u8680\uff08anisotropic\uff09\u3001\u5404\u5411\u540c\u6027\u523b\u8680\uff08isotropic\uff09\u3001\u5e95\u5207\uff08undercutting\uff09\u3001\u9009\u62e9\u6027\uff08selectivity\uff09
\n\u25a0\u7845\u6e7f\u6cd5\u523b\u8680\uff1a\u785d\u9178\u52a0\u6c22\u6c1f\u9178\u7684\u6df7\u5408\u6c34\u6eb6\u6db2\uff0c\u918b\u9178\u7b49\u53ef\u7528\u6765\u63a7\u5236\u653e\u70ed\u53cd\u5e94\uff1b
\n\u25a0\u4e8c\u6c27\u5316\u7845\u6e7f\u6cd5\u523b\u8680\uff1a\u57fa\u672c\u7684\u523b\u8680\u5242\u662f\u6c22\u6c1f\u9178(HF)\uff0c\u5b9e\u9645\u4e2d\u752849%\u7684\u6c22\u6c1f\u9178\u4e0e\u6c34\u6216\u6c1f\u5316\u80fa\u4e0e\u6c34\u6df7\u5408\u3002\u6c1f\u5316\u80fa[NH<INF\/4F>]\u6765\u7f13\u51b2\u4f1a\u52a0\u901f\u523b\u8680\u901f\u7387\u7684\u6c22\u79bb\u5b50\u7684\u4ea7\u751f\uff0c\u8fd9\u79cd\u523b\u8680\u6eb6\u6db2\u79f0\u4e3a\u7f13\u51b2\u6c27\u5316\u7269\u523b\u8680\uff08buffered oxide etche\uff09\u6216BOE\uff1b
\n\u25a0\u94dd\u819c\u6e7f\u6cd5\u523b\u8680\uff1a\u5bf9\u4e8e\u94dd\u548c\u94dd\u5408\u91d1\u6709\u9009\u62e9\u6027\u7684\u523b\u8680\u6eb6\u6db2\u662f\u57fa\u4e8e\u78f7\u9178\u7684\uff08\u542b\u6709\u78f7\u9178\u3001\u785d\u9178\u3001\u918b\u9178\u3001\u6c34\u548c\u6e7f\u5316\u4ee3\u7406\u726916\uff1a1\uff1a1\uff1a2\uff09\uff0c\u53ef\u6709\u6548\u6d88\u9664\u96ea\u7403\uff08snow ball\uff09\u7b49\u6c14\u6ce1\u73b0\u8c61\uff1b
\n\u25a0\u6dc0\u79ef\u6c27\u5316\u7269\u6e7f\u6cd5\u523b\u8680\uff1a\uff08\u94dd\u819c\u4e0a\u7684\u4e8c\u6c27\u5316\u7845\u949d\u5316\u819c\uff09\uff0c\u4e00\u822c\u7528BOE\u6eb6\u6db2\u523b\u8680\uff0c\u4f46\u5bb9\u6613\u9020\u6210Brown\u6216stain\uff0c\u53d7\u9752\u7750\u7684\u523b\u8680\u5242\u662f\u6c1f\u5316\u80fa\u548c\u918b\u91781\uff1a2\u7684\u6df7\u5408\u6c34\u6eb6\u6db2\uff1b
\n\u25a0\u6c2e\u5316\u7845\u6e7f\u6cd5\u523b\u8680\uff1a180\u2103\u70ed\u78f7\u9178\u6eb6\u6db2\uff0c\u4e00\u822c\u5149\u523b\u80f6\u627f\u53d7\u4e0d\u4e86\u6b64\u6e29\u5ea6\u548c\u523b\u8680\u901f\u7387\uff0c\u6539\u7528\u5e72\u6cd5\uff1b
\n\u25a0\u6e7f\u6cd5\u55b7\u5c04\u523b\u8680\uff1a\u5176\u4e3b\u8981\u4f18\u70b9\u662f\u55b7\u5c04\u7684\u673a\u68b0\u538b\u529b\u800c\u589e\u52a0\u4e86\u7cbe\u786e\u5ea6\u3001\u51cf\u5c0f\u6c61\u67d3\u3001\u53ef\u63a7\u6027\u66f4\u5f3a\u3001\u5de5\u827a\u4e00\u81f4\u6027\u66f4\u597d\uff0c\u7f3a\u70b9\u5728\u4e8e\u6210\u672c\u4ee5\u53ca\u538b\u529b\u7cfb\u7edf\u4e2d\u6709\u6bd2\u523b\u8680\u5242\u7684\u5b89\u5168\u6027\u548c\u5bf9\u673a\u5668\u8001\u5316\u6027\u7684\u8003\u9a8c\uff1b
\n\u25a0\u84b8\u6c14\u523b\u8680\uff1a\u7528HF\u84b8\u6c14\u5728\u5bc6\u5c01\u7684\u7cfb\u7edf\u4e2d\u8fdb\u884c\uff08\u4e00\u79cd\u65b0\u7684\u6280\u672f\uff09\uff1b
\n\u25a0\u5c0f\u5c3a\u5bf8\u6e7f\u6cd5\u523b\u8680\u7684\u5c40\u9650\uff1a
\n\u6e7f\u6cd5\u523b\u8680\u5c40\u9650\u4e8e3\u5fae\u7c73\u4ee5\u4e0a\u7684\u56fe\u6848\u5c3a\u5bf8\uff1b
\n\u6e7f\u6cd5\u523b\u8680\u4e3a\u5404\u5411\u540c\u6027\u523b\u8680\u5bfc\u81f4\u8fb9\u4fa7\u5f62\u6210\u659c\u5761\uff1b
\n\u6e7f\u6cd5\u523b\u8680\u5de5\u827a\u8981\u6c42\u51b2\u6d17\u548c\u5e72\u71e5\u6b65\u9aa4\uff1b
\n\u6db2\u4f53\u5316\u5b66\u54c1\u6709\u6bd2\u5bb3\uff1b
\n\u6e7f\u6cd5\u5de5\u827a\u5177\u6709\u6f5c\u5728\u7684\u6c61\u67d3\uff1b
\n\u5149\u523b\u80f6\u7c98\u7ed3\u529b\u7684\u5931\u6548\u5bfc\u81f4\u5e95\u5207\u3002
\nb.\u5e72\u6cd5\u523b\u8680\uff08dry etching\uff09\uff1a\u7b49\u79bb\u5b50\u4f53\u3001\u79bb\u5b50\u675f\u6253\u78e8\uff08\u523b\u8680\uff09\u548c\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff09
\n\u25a0\u7b49\u79bb\u5b50\u4f53\u523b\u8680\uff1a\u6876\u5f62\u523b\u8680\u673a\uff08barrel etcher\uff09\u3001\u5e73\u9762\u7b49\u79bb\u5b50\u523b\u8680\u673a\u3001\u7535\u5b50\u56de\u65cb\u52a0\u901f\u5668\u5171\u632f(ECR)\u3001\u9ad8\u5bc6\u5ea6\u53cd\u5c04\u7535\u5b50\u3001Helicon\u6ce2\u3001\u611f\u5e94\u8026\u5408\u7b49\u79bb\u5b50\uff08ICP\uff09\u3001\u53d8\u538b\u5668\u8026\u5408\u7b49\u79bb\u5b50\u4f53(TCP)\u7b49\uff1b
\n\u7b49\u79bb\u5b50\u4f53\u7cfb\u7edf\u7684\u523b\u8680\u7387\u7531\u7cfb\u7edf\u8bbe\u8ba1\u548c\u5316\u5b66\u54c1\u4e24\u4e2a\u4e3b\u8981\u56e0\u7d20\u51b3\u5b9a\uff0c\u5176\u5b83\u56e0\u7d20\u662f\u79bb\u5b50\u6d53\u5ea6\u548c\u7cfb\u7edf\u538b\u529b\uff1b\u8f90\u5c04\u635f\u4f24\uff08\u5bf9\u6676\u5706\u7684\u8f90\u5c04radiation\u6216\u5bf9\u7b49\u79bb\u5b50\u4f53plasma\u7684\u635f\u4f24\u3001\u975e\u5bfc\u4f53\u635f\u8017dielectric wearout\u3001\u4e0b\u6e38\u7b49\u79bb\u5b50\u4f53downstream plasma\uff09\uff1b
\n\u9009\u62e9\u6027\u662f\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u5de5\u827a\u7684\u4e00\u4e2a\u4e3b\u8981\u7684\u8003\u8651\u4e8b\u9879\uff0c\u7528\u4e8e\u63a7\u5236\u9009\u62e9\u6027\u76844\u79cd\u65b9\u6cd5\u662f\u523b\u8680\u6c14\u4f53\u914d\u6bd4\u7684\u9009\u62e9\u3001\u523b\u8680\u7387\u3001\u63a5\u8fd1\u5de5\u827a\u7ed3\u675f\u65f6\u7684\u6c14\u4f53\u7a00\u91ca\u6765\u51cf\u7f13\u5bf9\u4e0b\u5c42\u7684\u523b\u8680\u3001\u5728\u7cfb\u7edf\u4e2d\u4f7f\u7528\u7ed3\u675f\u70b9\u63a2\u6d4b\u5668\uff0c\u5176\u4ed6\u5173\u6ce8\u7684\u95ee\u9898\u8fd8\u6709\uff1a\u6c61\u67d3\u3001\u6b8b\u4f59\u7269\u3001\u8150\u8680\u4ee5\u53ca\u6240\u6709\u6743\u6210\u672c\uff1b
\n\u25a0\u79bb\u5b50\u675f\u523b\u8680\uff1a\u79bb\u5b50\u675f\u523b\u8680\u662f\u4e00\u4e2a\u7269\u7406\u5de5\u827a\uff0c\u52a8\u529b\u4f20\u8f93\uff08momentum transfer\uff09\u3001\u55b7\u6e85\u523b\u8680\uff08sputter etching\uff09\u6216\u79bb\u5b50\u6253\u78e8\uff08ion milling\uff09\uff1b\u6750\u6599\u7684\u53bb\u9664\u662f\u975e\u5e38\u6709\u65b9\u5411\u6027\uff08\u5404\u5411\u5f02\u6027\uff09\uff0c\u5bfc\u81f4\u826f\u597d\u7684\u5c0f\u5f00\u53e3\u533a\u57df\u7684\u7cbe\u5bc6\u5ea6\uff0c\u56e0\u4e3a\u662f\u7269\u7406\u5de5\u827a\uff0c\u79bb\u5b50\u6253\u78e8\u7684\u9009\u62e9\u6027\u5dee\uff1b
\n\u25a0\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff09\uff1a\u7ed3\u5408\u4e86\u524d\u4e8c\u8005\u7684\u4f18\u70b9\uff0c\u4e00\u4e2a\u4e3b\u8981\u4f18\u70b9\u662f\u5728\u523b\u8680\u7845\u5c42\u4e0a\u7684\u4e8c\u6c27\u5316\u7845\u5c42\uff0cRIE\u7cfb\u7edf\u5df2\u6210\u4e3a\u7528\u4e8e\u6700\u5148\u8fdb\u751f\u4ea7\u7ebf\u4e2d\u7684\u523b\u8680\u7cfb\u7edf\uff1b
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