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\n\u5206\u8fa8\u7387-resolution \u7279\u5f81\u56fe\u5f62\u5c3a\u5bf8-feature size \u56fe\u50cf\u5c3a\u5bf8-image size \u5b9a\u4f4d\u56fe\u5f62-Alignment or Registration \u805a\u5408-polymerization \u6297\u523b\u8680\u7684-etch resistant or Resist or Photoresist \u4eae\u573a\u63a9\u819c\u7248-clear field mask \u5149\u6eb6\u89e3-photosolubilization\uff1b
\n\u8d1f\u80f6+\u4eae\u573a\u6216\u6b63\u80f6+\u6697\u573a\u5f62\u6210\u7a7a\u7a74\uff1b \u8d1f\u80f6+\u6697\u573a\u6216\u6b63\u80f6+\u4eae\u573a\u5f62\u6210\u51f8\u8d77\uff1b
\n2\u3001\u5149\u523b\u5341\u6b65\u6cd5\uff1a
\n\u8868\u9762\u51c6\u5907\u2014\u6d82\u5149\u523b\u80f6\u2014\u8f6f\u70d8\u7119\u2014\u5bf9\u51c6\u548c\u66dd\u5149\u2014\u663e\u5f71\u2014\u786c\u70d8\u7119\u2014\u663e\u5f71\u76ee\u6d4b\u2014\u523b\u8680\u2014\u5149\u523b\u80f6\u53bb\u9664\u2014\u6700\u7ec8\u76ee\u68c0\uff1b
\n3\u3001\u57fa\u672c\u7684\u5149\u523b\u80f6\u5316\u5b66\u7269\u7406\u5c5e\u6027\uff1a
\na\u3001\u7ec4\u6210\uff1a\u805a\u5408\u7269+\u6eb6\u5242+\u611f\u5149\u5242+\u6dfb\u52a0\u5242
\n\u666e\u901a\u5e94\u7528\u7684\u5149\u523b\u80f6\u88ab\u8bbe\u8ba1\u6210\u4e0e\u7d2b\u5916\u7ebf\u548c\u6fc0\u5149\u53cd\u5e94\uff0c\u5b83\u4eec\u79f0\u4e3a\u5149\u5b66\u5149\u523b\u80f6\uff08optical resist\uff09\uff0c\u8fd8\u6709\u5176\u5b83\u5149\u523b\u80f6\u53ef\u4ee5\u4e0eX\u5c04\u7ebf\u6216\u8005\u7535\u5b50\u675f\u53cd\u5e94\uff1b
\n\u8d1f\u80f6\uff1a\u805a\u5408\u7269\u66dd\u5149\u540e\u4f1a\u7531\u975e\u805a\u5408\u6001\u53d8\u4e3a\u805a\u5408\u72b6\u6001\uff0c\u5f62\u6210\u4e00\u79cd\u4e92\u76f8\u7c98\u7ed3\u7684\u7269\u8d28\uff0c\u662f\u6297\u523b\u8680\u7684\uff0c\u5927\u591a\u6570\u8d1f\u80f6\u91cc\u9762\u7684\u805a\u5408\u7269\u662f\u805a\u5f02\u620a\u4e8c\u70ef\u7c7b\u578b\u7684\uff0c\u65e9\u671f\u662f\u57fa\u4e8e\u6a61\u80f6\u578b\u7684\u805a\u5408\u7269\uff1b
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\n\u5316\u5b66\u653e\u5927\u5149\u523b\u80f6-chemically amplified resist\u00a0 \u8d1f\u80f6\u5149\u654f\u5242-Bis-aryldiazide \u6b63\u80f6\u5149\u654f\u5242-O-naphthaquinonediazide
\nb\u3001\u5149\u523b\u80f6\u7684\u8868\u73b0\u8981\u7d20\uff1a
\n\u5206\u8fa8\u7387\uff1aresolution capability\u3001\u7eb5\u6a2a\u6bd4-aspect ratio\uff08\u5149\u523b\u80f6\u539a\u5ea6\u4e0e\u56fe\u5f62\u6253\u5f00\u5c3a\u5bf8\u7684\u6bd4\u503c\u3001\u6b63\u80f6\u4e00\u822c\u6bd4\u8d1f\u80f6\u6709\u66f4\u9ad8\u7684\u7eb5\u6a2a\u6bd4\uff09\uff1b
\n\u7c98\u7ed3\u80fd\u529b\uff1a\u8d1f\u80f6\u7684\u7c98\u7ed3\u80fd\u529b\u901a\u5e38\u6bd4\u6b63\u80f6\u5f3a\u4e00\u4e9b\uff1b
\n\u66dd\u5149\u901f\u5ea6\u3001\u7075\u654f\u6027\u548c\u66dd\u5149\u6e90\uff1a\u53cd\u5e94\u901f\u5ea6\u8d8a\u5feb\uff0c\u5728\u5149\u523b\u8680\u533a\u57df\u6676\u5706\u7684\u52a0\u5de5\u901f\u5ea6\u8d8a\u5feb\uff1b\u7075\u654f\u6027\u662f\u4e0e\u5bfc\u81f4\u805a\u5408\u6216\u8005\u5149\u6eb6\u89e3\u53d1\u751f\u6240\u9700\u8981\u7684\u80fd\u91cf\u603b\u548c\u76f8\u5173\u7684\uff1b\u6ce2\u957f\u8d8a\u77ed\u7684\u5c04\u7ebf\u80fd\u91cf\u8d8a\u9ad8\uff1b
\n\u5de5\u827a\u5bbd\u5bb9\u5ea6\uff1a\u5de5\u827a\u7ef4\u5ea6\u8d8a\u5bbd\uff0c\u5728\u6676\u5706\u8868\u9762\u8fbe\u5230\u6240\u9700\u8981\u5c3a\u5bf8\u7684\u53ef\u80fd\u6027\u5c31\u8d8a\u5927\uff1b
\n\u9488\u5b54\uff1a\u9488\u5b54\u662f\u5149\u523b\u80f6\u5c42\u5c3a\u5bf8\u975e\u5e38\u5c0f\u7684\u7a7a\u7a74\uff0c\u5149\u523b\u80f6\u5c42\u8d8a\u8584\uff0c\u9488\u5b54\u8d8a\u591a\uff0c\u5178\u578b\u7684\u6743\u8861\u4e4b\u4e00\uff1b
\n\u5fae\u7c92\u548c\u6c61\u67d3\u6c34\u5e73\u3001\u9636\u68af\u8986\u76d6\u5ea6\u548c\u70ed\u6d41\u7a0b\uff1b
\nc\u3001\u6b63\u80f6\u548c\u8d1f\u80f6\u7684\u6bd4\u8f83\uff1a
\n\u76f4\u523020\u4e16\u7eaa70\u5e74\u4ee3\u4e2d\u671f\uff0c\u8d1f\u80f6\u4e00\u76f4\u5728\u5149\u523b\u5de5\u827a\u4e2d\u5360\u4e3b\u5bfc\u5730\u4f4d\uff0c\u523020\u4e16\u7eaa80\u5e74\u4ee3\uff0c\u6b63\u80f6\u9010\u6e10\u88ab\u63a5\u53d7\u3002\u4e24\u8005\u76f8\u6bd4\u4f18\u7f3a\u70b9\u5982\u4e0b\uff1a\u6b63\u80f6\u7684\u7eb5\u6a2a\u6bd4\u66f4\u9ad8\u3001\u8d1f\u80f6\u7684\u7c98\u7ed3\u529b\u66f4\u5f3a\u66dd\u5149\u901f\u5ea6\u66f4\u5feb\u3001\u6b63\u80f6\u7684\u9488\u5b54\u6570\u91cf\u66f4\u597d\u9636\u68af\u8986\u76d6\u5ea6\u66f4\u597d\uff0c\u4f46\u6210\u672c\u66f4\u9ad8\u3001\u6b63\u80f6\u4f7f\u7528\u6c34\u6eb6\u6027\u6eb6\u5242\u663e\u5f71\u800c\u8d1f\u80f6\u4f7f\u7528\u6709\u673a\u6eb6\u5242\u663e\u5f71\uff1b
\nd\u3001\u5149\u523b\u80f6\u7684\u7269\u7406\u5c5e\u6027\uff1a
\n\u56fa\u4f53\u542b\u91cf\uff1asolid content \u4e00\u822c\u572820%-40%\uff1b
\n\u7c98\u5ea6\uff1a\u6d4b\u8bd5\u65b9\u6cd5\u6709\u843d\u7403\u7c98\u5ea6\u8ba1\u91cf\u5668\u3001Ostwalk-Cannon-Fenske\u65b9\u6cd5\u3001\u8f6c\u52a8\u98ce\u5411\u6807\u6cd5\u3001\u7c98\u5ea6\u5355\u4f4d\u662f\u5398\u6cca\uff08centipoise\uff09\uff0c\u53e6\u4e00\u79cd\u5355\u4f4d\u79f0\u4e3akinematic\u7c98\u5ea6\uff0c\u5b83\u662fcentistoke\uff0c\u7531 \u7c98\u5ea6\uff08\u5398\u6cca\uff09\u9664\u4ee5\u5149\u523b\u80f6\u5bc6\u5ea6\u800c\u5f97\u5230\uff0c\u9ed8\u8ba4\u6e29\u5ea6\u4e3a25\u5ea6\uff1b
\n\u8868\u9762\u5f20\u529b\uff1b
\n\u6298\u5c04\u7cfb\u6570\uff1aindex of refraction\uff0c\u5bf9\u4e8e\u5149\u523b\u80f6\u5176\u6298\u5c04\u7387\u548c\u73bb\u7483\u63a5\u8fd1\u7ea6\u4e3a1.45\uff1b
\n\u50a8\u5b58\u4e0e\u63a7\u5236\uff1a \u5149\u70ed\u654f\u611f\u5ea6\u3001\u7c98\u6027\u654f\u611f\u5ea6\u3001\u6e05\u6d01\u5ea6\u2026\u2026
\n4\u3001\u5149\u523b\u5de5\u827a\u5256\u6790\uff1a
\na\u3001\u8868\u9762\u51c6\u5907\uff1a
\n\u5fae\u7c92\u6e05\u9664\uff1a\u9ad8\u538b\u6c2e\u6c14\u5439\u9664\u3001\u5316\u5b66\u6e7f\u6cd5\u6e05\u6d17\u3001\u65cb\u8f6c\u5237\u5237\u6d17\u3001\u9ad8\u538b\u6c34\u6d41\uff1b
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\nb\u3001\u6d82\u5149\u523b\u80f6\uff1a
\n\u666e\u901a\u7684\u5149\u523b\u80f6\u6d82\u80f6\u65b9\u6cd5\u6709\u4e09\u79cd\uff1a\u5237\u6cd5\u3001\u6eda\u8f6c\u65b9\u6cd5\u548c\u6d78\u6ce1\u6cd5\uff0cIC\u5c01\u88c5\u7528\u5149\u523b\u80f6\u7684\u6d82\u5e03\u65b9\u6cd5\u5982\u4e0b\uff1a
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\nc\u3001\u8f6f\u70d8\u7119:
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