{"id":299,"date":"2009-01-22T10:46:08","date_gmt":"2009-01-22T02:46:08","guid":{"rendered":"http:\/\/www.g4e.cn\/wordpress\/?p=299"},"modified":"2013-11-14T16:12:05","modified_gmt":"2013-11-14T08:12:05","slug":"oxidation","status":"publish","type":"post","link":"http:\/\/www.g4e.cn\/wordpress\/learnrecord\/299.html","title":{"rendered":"\u7b2c\u4e03\u7ae0 \u6c27\u5316"},"content":{"rendered":"<p>1\u3001\u4e8c\u6c27\u5316\u7845\u5c42\u7684\u7528\u9014\uff1a<br \/>\na.\u8868\u9762\u949d\u5316\uff1a\u4fdd\u62a4\u5668\u4ef6\u7684\u8868\u9762\u53ca\u5185\u90e8\u3001\u7981\u9522\u6c61\u67d3\u7269\u5728\u4e8c\u6c27\u5316\u7845\u819c\u4e2d\uff1b<br \/>\nb.\u63ba\u6742\u963b\u6321\u5c42\uff1a\u63ba\u6742\u7269\u5728\u4e8c\u6c27\u5316\u7845\u7684\u8fd0\u884c\u901f\u5ea6\u4f4e\u4e8e\u7845\u4e2d\u7684\u8fd0\u884c\u901f\u5ea6\u3001\u4e8c\u6c27\u5316\u7845\u7684\u81a8\u80c0\u7cfb\u6570\u4e0e\u7845\u63a5\u8fd1\uff1b<br \/>\nc.\u8868\u9762\u7edd\u7f18\u4f53\uff1a\u6c27\u5316\u5c42\u5fc5\u987b\u8db3\u591f\u539a\uff0c\u4ee5\u514d\u4ea7\u751f\u611f\u5e94\u73b0\u8c61\uff0c\u79f0\u4e3a\u573a\u6c27\u5316\u7269\uff1b<br \/>\nd.\u5668\u4ef6\u7edd\u7f18\u4f53\uff1a\u70ed\u751f\u6210\u7684\u6c27\u5316\u5c42\u53ef\u4ee5\u7528\u6765\u505a\u7845\u8868\u9762\u548c\u5bfc\u7535\u8868\u9762\u4e4b\u95f4\u5f62\u6210\u7684\u7535\u5bb9\u6240\u9700\u7684\u4ecb\u7535\u8d28\uff1b<br \/>\ne.\u5668\u4ef6\u6c27\u5316\u7269\u7684\u539a\u5ea6\u4e0e\u7528\u9014\uff1a<br \/>\n60\u2014100\u57c3\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \u96a7\u9053\u6805\u6781<br \/>\n150\u2014500\u57c3\u00a0\u00a0\u00a0\u00a0\u00a0 \u6805\u6781\u6c27\u5316\u3001\u7535\u5bb9\u7edd\u7f18\u5c42<br \/>\n200\u2014500\u57c3\u00a0\u00a0\u00a0\u00a0\u00a0 LOCOS\u6c27\u5316<br \/>\n2000\u20145000\u57c3\u00a0\u00a0\u00a0 \u63a9\u819c\u6c27\u5316\u3001\u8868\u9762\u949d\u5316<br \/>\n3000\u201410000\u57c3\u00a0\u00a0 \u573a\u6c27\u5316<br \/>\n2\u3001\u70ed\u6c27\u5316\u673a\u5236\uff1a\u9636\u68af\u5f0f\u5347\u6e29\u65b9\u6cd5\uff0c900-1000\u2103\u4e4b\u95f4<br \/>\na.\u751f\u957f\u6c27\u5316\u5c42\u4f1a\u7ecf\u5386\u4e24\u4e2a\u9636\u6bb5\uff1a\u7ebf\u6027\u9636\u6bb5\uff08&lt;1000\u57c3\uff09\u548c\u629b\u7269\u7ebf\u9636\u6bb5;<br \/>\n\u53d7\u9650\u53cd\u5e94\uff08transport limited reaction\uff09\u3001\u53d7\u9650\u6269\u6563\u53cd\u5e94\uff08diffusion limited reaction\uff09\uff1b<br \/>\nb.\u4e00\u4e2a\u52a0\u901f\u6c27\u5316\u65b9\u6cd5\u662f\u7528\u6c34\u84b8\u6c14\uff08H2O\uff09\u6765\u4ee3\u66ff\u6c27\u6c14\u505a\u6c27\u5316\u5242\uff0c\u6c22\u6c27\u57fa\u79bb\u5b50\u6269\u6563\u7a7f\u8fc7\u6676\u5706\u4e0a\u7684\u6c27\u5316\u5c42\u7684\u80fd\u529b\u6bd4\u6c27\u6c14\u5feb\uff1b<br \/>\n\u84b8\u6c14\u6c27\u5316\uff08steam oxidation\uff09\u3001\u6e7f\u6c27\u5316\uff08wet oxidation\uff09\u3001\u9ad8\u6e29\u84b8\u6c14\u6c27\u5316\uff08pyrogenic steam\uff09\uff1b<!--more--><br \/>\nc.\u6c27\u5316\u7387\u7684\u5f71\u54cd\u56e0\u7d20\uff1a<br \/>\n\u6676\u683c\u65b9\u5411\uff08&lt;111&gt;\u6bd4&lt;100&gt;\u5feb\uff09\u3001\u6676\u5706\u63ba\u6742\u7269\u7684\u518d\u5206\u914d\uff08N\u578b\u5806\u79ef\u3001P\u578b\u6d88\u8017\uff09\u3001\u6c27\u5316\u6742\u8d28\u3001\u591a\u6676\u7845\u6c27\u5316\u3001\u4e0d\u5747\u4e0e\u7684\u6c27\u5316\u7387\u53ca\u6c27\u5316\u6b65\u9aa4<br \/>\n3\u3001\u70ed\u6c27\u5316\u65b9\u6cd5\uff1a\u70ed\u6c27\u5316\u53cd\u5e94\uff08thermal oxidation\uff09-\u5e38\u538b\u3001\u9ad8\u538b\u3001\u9633\u6781\u6c27\u5316<br \/>\n4\u3001\u6c34\u5e73\u7089\u7ba1\u53cd\u5e94\u7089\uff08diffusion furnaces or tube furnace\uff09\uff1a\u53cd\u5e94\u5ba4\u3001\u6e29\u5ea6\u63a7\u5236\u7cfb\u7edf\u3001\u53cd\u5e94\u7089\u3001\u6c14\u4f53\u67dc\u3001\u6676\u5706\u6e05\u6d17\u7ad9\u3001\u88c5\u7247\u7ad9\u3001\u5de5\u827a\u81ea\u52a8\u5316\uff1b<br \/>\na.\u53cd\u5e94\u5ba4\uff1a\u9ad8\u7eaf\u5ea6\u77f3\u82f1\uff08\u5927\u4e8e1200\u2103\u65f6\u6613\u7834\u788e\u79f0\u4e3a\u949d\u5316devitrification\uff09\u6216\u6c2e\u5316\u7845\u6750\u6599\uff1b<br \/>\nb.\u6e29\u5ea6\u63a7\u5236\u7cfb\u7edf\uff1a\u81ea\u52a8\u6e29\u5ea6\u5206\u5e03\u66f2\u7ebf\u63a7\u5236\u7cfb\u7edf\uff08autoprofiling\uff09\u3001\u9010\u6e10\u52a0\u6e29\uff08ramping\uff09\u3001\u5f85\u673a\u72b6\u6001\uff08idle\uff09\uff1b<br \/>\nc.\u53cd\u5e94\u7089\u7ed3\u6784\uff1a\u4e00\u822c\u67093-4\u4e2a\u7089\u7ba1\uff0c\u53ef\u7528\u4e8e\u540c\u4e00\u79cd\u5de5\u827a\u6216\u88ab\u8bbe\u8ba1\u6210\u4e0d\u540c\u7684\u64cd\u4f5c\uff1b<br \/>\nd.\u6c14\u4f53\u67dc\uff08source cabinet\uff09\uff1a\u6c14\u4f53\u63a7\u5236\u9762\u677f\uff08gas control panel\uff09\u3001\u6c14\u4f53\u6d41\u91cf\u63a7\u5236\u5668\uff08gas flow controller\uff09\u3001\u7269\u6d41\u63a7\u5236\u5668\uff08mass flow meter\uff09\u3001\u4e1b\u6797\uff08jungle\uff09\u3001\u6c27\u5316\u6e90\uff08\u5e72\u6c27\u3001\u6c34\u84b8\u6c14\u6e90\u3001\u6c14\u6ce1\u53d1\u751f\u5668\u3001\u5e72\u6c27\u5316\u3001\u52a0\u6c2f\u6c27\u5316\uff09<br \/>\ne.\u6676\u5706\u6e05\u6d17\u7ad9\uff1a\u81ea\u52a8\u6e05\u6d17\u673a\uff08VLF\u6e7f\u69fd\uff09+\u6f02\u6d17\u673a+\u5e72\u71e5\u673a<br \/>\nf.\u88c5\u7247\u7ad9\uff1a\u81ea\u52a8\u6676\u5706\u88c5\u8f7d\uff08\u77f3\u82f1\u821f\u3001\u8c61\u9f3b\u7ba1elephant\u3001\u6868paddle\uff09\u3001\u624b\u52a8\u88c5\u8f7d\u6676\u5706<br \/>\ng.\u6c27\u5316\u5de5\u827a\u7684\u81ea\u52a8\u5316\uff1a\u65f6\u95f4\u3001\u6e29\u5ea6\u3001\u53cd\u5e94\u6c14\u4f53\u987a\u5e8f\u53ca\u63a8\u8fdb\uff0c\u63a8\u51fa\u901f\u7387\u7b49\u7f16\u5165\u7a0b\u5e8f\u5f62\u6210\u914d\u65b9recipe<br \/>\n5\u3001\u5782\u76f4\u7089\u7ba1\u53cd\u5e94\u7089\uff1a\u5c42\u6d41\u72b6\u6001\uff08laminar gas flow\uff09<br \/>\n6\u3001\u5feb\u901f\u5347\u6e29\u53cd\u5e94\u7089\uff1a\u901a\u5e38\u53cd\u5e94\u7089\u6bcf\u5206\u949f\u5347\u6e29\u51e0\u5ea6\uff0c\u5feb\u901f\u5347\u6e29\u7089\u53ef\u4ee5\u6bcf\u5206\u949f\u5341\u51e0\u5ea6\uff1b<br \/>\n7\u3001\u5feb\u901f\u52a0\u70ed\u5de5\u827a\uff08RTP\uff09\uff1aRTP\u5de5\u827a\u662f\u57fa\u4e8e\u70ed\u8f90\u5c04\u539f\u7406\uff0c\u5176\u5e94\u7528\u51cf\u5c11\u4e86\u5de5\u827a\u6240\u9700\u7684\u70ed\u9884\u7b97\uff08thermal budget\uff09\uff0c\u7528\u4e8e\u6c27\u5316\u7684RTP\u7cfb\u7edf\u4e5f\u53eb\u505a\u5feb\u901f\u70ed\u6c27\u5316\uff08Rapid Thermal Oxidation\uff0cRTO\uff09\u7cfb\u7edf\u3002\u5176\u4ed6\u5e94\u7528RTP\u6280\u672f\u7684\u5de5\u827a\u5305\u62ec\uff1a\u6e7f\u6c27\u5316\u3001\u5c40\u90e8\u6c27\u5316\u3001\u79bb\u5b50\u6ce8\u5165\u540e\u7684\u6e90\u6781\/\u6f0f\u6781\u7684\u6d3b\u5316\u3001LPCVD\u591a\u6676\u7845\u3001\u65e0\u5b9a\u5f62\u7845\u3001\u94a8\u3001\u7845\u5316\u7269\u3001LPCVD\u6c2e\u5316\u548cLPCVD\u6c27\u5316\u3002<br \/>\n8\u3001\u9ad8\u538b\u6c27\u5316\uff1a\u91c7\u7528\u9ad8\u538b\u540e\u4e00\u79cd\u89e3\u51b3\u65b9\u6848\u662f\u964d\u4f4e\u53cd\u5e94\u6e29\u5ea6\uff0c\u6bcf\u589e\u52a0\u4e00\u4e2a\u5927\u6c14\u538b\u6e29\u5ea6\u53ef\u4ee5\u964d30\u2103\uff1b\u53e6\u4e00\u79cd\u65b9\u6848\u662f\u7528\u9ad8\u538b\u7cfb\u7edf\u6765\u7ef4\u6301\u6b63\u5e38\u7684\u53cd\u5e94\u901f\u5ea6\uff0c\u51cf\u5c11\u6c27\u5316\u65f6\u95f4\u3002<br \/>\na.\u53ef\u4ee5\u89e3\u51b3\u5728\u5c40\u90e8\u6c27\u5316\u4e2d\uff08LOCOS\uff09\u4ea7\u751f\u7684\u201c\u9e1f\u5634\u201d\u95ee\u9898\uff1b<br \/>\nb.\u6c27\u5316\u524d\u6676\u5706\u7684\u6e05\u6d17\uff1a\u673a\u68b0\u6e05\u6d17\u2014RCA\u6e7f\u6d17\u2014\u6c22\u6c1f\u9178\uff08HF\uff09\u6216\u7a00\u91ca\u7684\u6c22\u6c1f\u9178\u6e05\u6d17\uff1b<br \/>\n9\u3001\u6c27\u5316\u5de5\u827a\uff1a\u5b9e\u9645\u7684\u6c27\u5316\u662f\u5728\u7089\u7ba1\u53cd\u5e94\u7089\u4e2d\uff0c\u5728\u4e0d\u540c\u7684\u6c14\u4f53\u5faa\u73af\u4e2d\u8fdb\u884c\u7684\uff08\u6c2e\u6c14-\u6c27\u6c14-\u6c2e\u6c14\u5faa\u73af\uff09<br \/>\na.\u6c14\u6e90\uff1a\u6c27\u6c14\u3001\u6c27\u6c14\u4e2d\u7684\u6c2f\u6c14\uff08Cl2\uff09\u3001\u6c2f\u5316\u6c22\uff08HCl\uff09\u3001\u4e09\u6c2f\u4e59\u70ef\uff08TCE\uff09\u6216\u6c2f\u4eff\uff08TCA\uff09;<br \/>\nb.\u540e\u6c27\u5316\u8bc4\u4f30\uff1a\u4e00\u4e9b\u8bc4\u4f30\u7531\u64cd\u4f5c\u5458\u5728\u7ebf\u5b9e\u884c\u3001\u53e6\u4e00\u4e9b\u8bc4\u4f30\u7531\u8d28\u91cf\u63a7\u5236\u5b9e\u9a8c\u5ba4\u79bb\u7ebf\u5b9e\u65bd\uff1b<br \/>\nc.\u8868\u9762\u68c0\u6d4b\uff1a\u9ad8\u4eae\u5ea6\u7d2b\u5916\u7ebf\u4e0b\u5bf9\u6bcf\u7247\u6676\u5706\u8fdb\u884c\u68c0\u6d4b\uff1b<br \/>\nd.\u6c27\u5316\u539a\u5ea6\uff1a\u68c0\u6d4b\u6280\u672f\u5305\u62ec\u989c\u8272\u6bd4\u8f83\u3001\u8fb9\u7f18\u8bb0\u6570\u3001\u5e72\u6d89\u3001\u692d\u504f\u4eea\u3001\u523b\u7eb9\u9488\u632f\u5e45\u4eea\u548c\u7535\u5b50\u626b\u63cf\u663e\u5fae\u955c\uff1b<br \/>\ne.\u6c27\u5316\u548c\u7089\u7ba1\u6e05\u6d17\uff1a\u9897\u7c92\u3001\u6c61\u70b9\u53ca\u79fb\u52a8\u79bb\u5b50\u6c61\u67d3\u6700\u5c0f\u5316\uff1b\u7edd\u7f18\u6750\u6599\u7684\u5f3a\u5ea6\uff1b\u6c27\u5316\u5c42\u7684\u6298\u5c04\u7387\uff1b<br \/>\n10\u3001\u9633\u6781\u6c27\u5316\uff1a\u7845\u6676\u5706\u8fde\u5728\u6b63\u6781\uff08\u9633\u6781\uff09\u4e0a\uff0c\u540c\u65f6\u69fd\u8fde\u5728\u8d1f\u6781\uff08\u9634\u6781\uff09\u4e0a\uff0c\u4e24\u79cd\u5747\u6c89\u6d78\u5728KNO3\u6eb6\u6db2\u91cc\u3002\u9633\u6781\u6c27\u5316\u7684\u57fa\u672c\u5e94\u7528\u662f\u5728\u6676\u5706\u8868\u9762\u5f62\u6210\u53c2\u6742\u6d53\u5ea6\u7684\u66f2\u7ebf\uff1b<br \/>\n11\u3001\u70ed\u6c2e\u5316\uff1a\u6c2e\u5316\u7845\u819c\uff08Si3N4\uff09\uff0c\u7845\u8868\u9762\u66b4\u9732\u5728\u6c28\u6c14\uff08NH3\uff09\u4e2d\u800c\u751f\u6210\u6c2e\u5316\u7845\u3002\u67d0\u4e9b\u9ad8\u7ea7\u5668\u4ef6\u4e2d\u4e5f\u4f7f\u7528\u6c27\u6c2e\u5316\u7845\u819c\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>1\u3001\u4e8c\u6c27\u5316\u7845\u5c42\u7684\u7528\u9014\uff1a a.\u8868\u9762\u949d\u5316\uff1a\u4fdd\u62a4\u5668\u4ef6\u7684\u8868\u9762\u53ca\u5185\u90e8\u3001\u7981\u9522\u6c61\u67d3\u7269\u5728\u4e8c\u6c27\u5316\u7845\u819c\u4e2d\uff1b b.\u63ba\u6742\u963b\u6321\u5c42\uff1a\u63ba\u6742\u7269 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":3425,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[5],"tags":[686,148],"_links":{"self":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts\/299"}],"collection":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/comments?post=299"}],"version-history":[{"count":0,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/posts\/299\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/media\/3425"}],"wp:attachment":[{"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/media?parent=299"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/categories?post=299"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.g4e.cn\/wordpress\/wp-json\/wp\/v2\/tags?post=299"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}